JPH062085Y2 - 格子干渉型変位検出装置 - Google Patents
格子干渉型変位検出装置Info
- Publication number
- JPH062085Y2 JPH062085Y2 JP12847088U JP12847088U JPH062085Y2 JP H062085 Y2 JPH062085 Y2 JP H062085Y2 JP 12847088 U JP12847088 U JP 12847088U JP 12847088 U JP12847088 U JP 12847088U JP H062085 Y2 JPH062085 Y2 JP H062085Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- output
- light source
- light receiving
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 25
- 238000001514 detection method Methods 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 17
- 230000004907 flux Effects 0.000 claims description 14
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12847088U JPH062085Y2 (ja) | 1988-09-30 | 1988-09-30 | 格子干渉型変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12847088U JPH062085Y2 (ja) | 1988-09-30 | 1988-09-30 | 格子干渉型変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0248809U JPH0248809U (en]) | 1990-04-04 |
| JPH062085Y2 true JPH062085Y2 (ja) | 1994-01-19 |
Family
ID=31381840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12847088U Expired - Lifetime JPH062085Y2 (ja) | 1988-09-30 | 1988-09-30 | 格子干渉型変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062085Y2 (en]) |
-
1988
- 1988-09-30 JP JP12847088U patent/JPH062085Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248809U (en]) | 1990-04-04 |
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